RESEARCH PAPER
Corrosion-protective coatings deposited by the PE-CVD method under atmospheric pressure
1
Faculty of Chemistry, Warsaw University of Technology, Noakowskiego 3, 00-664 Warszawa, Poland
Publication date: 2021-04-23
Acta Agroph. 2002, (80), 267-274
KEYWORDS
ABSTRACT
Protection against the aggressive action of environment is an important problem in the manufacture of integrated circuits. For this reason an extensive search has been carried on to develop thin. well adhesive corrosion-protective coatings. capable of competing with generally used epoxy resins. This study has been devoted to SiO2 coatings deposited under atmospheric pressure by the PECVD method from tetramethoxysilane (TMOS) used in the mixtures of TMOS + Ar or TMOS + Ar + O2, The coatings were deposited on aluminium printed circuits (testers) and aged at 121 QC and 100% relative humidity. The process enables to observe the stability of the coatings, and the changes in electric resistance of the circuits retlect the development of corrosion.
METADATA IN OTHER LANGUAGES:
Polish
Powłoki antykorozyjne nanoszone metodą PE-CVD pod ciśnieniem atmosferycznym
cienkie warstwy, warstwa antykorozyjna
Przedmiotem badań są powłoki z SiO2 osadzane pod ciśnieniem atmosferycznym metodą PE-CVD z tetrametoksysilanu (TMOS) stosowanego w mieszaninach TMOS + Ar i TMOS + Ar + O2 w celu zabezpieczenia układów scalonych przed korozją. Powłoki nakłada się na aluminiowe obwody drukowane (testery), poddaje się procesowi starzenia w temperaturze 121°C i wilgotności względnej 100%. Proces ten pozwala na obserwację trwałości powłok natomiast zmiany rezystancji obwodów świadczą o postępie korozji.
| eISSN: | 2300-6730 |
| ISSN: | 1234-4125 |
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