RESEARCH PAPER
Spectroscopic study of reactive sputtering of titanium in the linear magnetron
1
Institute of Inorganic Chemistry and Metallurgy of Rare Elements, Wrocław University of Technology, Wyb. Wyspiańskiego 27, 50-370 Wrocław, Poland
Publication date: 2021-04-01
Acta Agroph. 2002, (80), 17-24
KEYWORDS
ABSTRACT
This paper presents the results of investigations, performed by means of optical emission spectroscopy, for the linear magnetron discharge with titanium target in various argonnitrogen mixtures. Emission intensities of titanium lines, Ti I, as well as Ar I, Ar II, N2, N2+ and TiN spectra versus nitrogen contents in the gas mixture have been examined. The N2 concentration was varied from zero to about 40% in the mixture. The effect of target poisoning was clearly revealed in the emission spectra. At constant discharge current equal to 0.3 A and the total pressure about 3 Pa the critical gas flow for the transition from the metallic to the reactive modes has corresponded to about 3% N2 in Ar/N2 mixture.
METADATA IN OTHER LANGUAGES:
Polish
Badania spektralne reaktywnego rozpylania tytanu w magnetronie liniowym
magnetron liniowy, spektroskopia emisyjna, TiN, rozpylanie tytanu
Praca przedstawia rezultaty badan spektralnych magnetronowego urządzenia rozpylającego, wyposażonego w tytanową katodę w mieszaninach argonowo-azotowych. Prześledzono zmiany intensywności emisji linii Em titanu, Ti I, a także Ar I, Ar II, pasma N2, N2+ i TiN w funkcji ilości dostarczanego gazu reaktywnego (N2). Stężenie N2 było zmieniane od 0 do ok. 40% max. Dla stałej wartości prądu wyładowania 0,3 A i ciśnienia około 0,3 Pa gwałtowne zmiany w intensywności wszystkich obserwowanych widm, wskazujące na przechodzenie ze stanu metalicznego do zatrutego, wystąpiły już przy zawartości azotu około 3%.
| eISSN: | 2300-6730 |
| ISSN: | 1234-4125 |
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