A gaseous mixture composed of tetraisopropoxytitanium, nitrogen and hydrogen in the PACVD process, has been used to obtain Ti(NCO) layers of good performance properties, such as a high hardness and good resistance to corrosion and to frictional wear. The temperature of the process is 500°C. The paper describes a method which permits improving the properties of the Ti(NCO) type and composite nitrided + Ti(NCO) type layers by plasma nitriding treatment. The structure of the layers is described and their wear and corrosion resistance is determined. The results of SEM examinations. chemical composition, microhardness discussed. The nitrogen content can be increased by using pre-nitrided substrates and by subjecting the Ti(NCO) layers obtained to nitrogen plasma annealing. The next part of the paper presents the possibilities of obtaining chromium nitride layers from the gaseous mixture containing the chromium acetylacetonate vapours. The influence of process temperature on produced layers is discussed.